Process of Making Three-dimensional Microstructures using Vaporization of a Sacrificial Component
نویسندگان
چکیده
منابع مشابه
Three-Dimensional Sacrificial Etching
In MEMS fabrication micro-mechanical components have to be partially released from a substrate. Selectively etching away sacrificial layers, such that a free standing structure remains, is a widely used technique for this purpose. Free standing structures allow MEMS devices to induce or to sense mechanical movements or vibrations. During sacrificial etching lower etch rates than the blanket one...
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Sacrificial etching is one of the most important process steps in micro-electro-mechanical systems technology, since it enables the generation of free-standing structures. These structures are often the main part of micro-mechanical devices, intended to sense or induce a mechanical movement. The etching process transforms an initial multi-segmented geometry and depends on material properties an...
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ژورنال
عنوان ژورنال: Journal of Visualized Experiments
سال: 2013
ISSN: 1940-087X
DOI: 10.3791/50459